Nanotechnology, the industrial revolution of the 21st century, will have far-reaching impact on Science, Technology and Industrial Sectors worldwide. The importance of Microsystems and Nanotechnology has also been realized in India and the government of India’s Department of Science and Technology, Defence Research & Development Organization (DRDO)and Ministry of Communication and Information Technology, have allocated special funds for research and development in these sectors. Several Indian companies have also recently shown interest in these technologies and are engaged in Microsystems (MEMS) development and production. This volume is a Compendium of the papers presented in the Conference on Business Opportunities in Microsystems and Nanotechnology.